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Измерения и контроль в микроэлектронике

317296

Дубовой Н. Д., Осокин В. И., Очков А. С.

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Germany
 balta
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A manual for students specializing in electronic engineering. Chapters: Measurement, control and testing of ICs (integrated circuits). Basic concepts and definitions; IC production technology; Control and measurement operations in the production of ICs; Methods for measuring and monitoring the parameters of technological media, semiconductor wafers, epitaxial and semiconductor structures; General methods for measuring and monitoring electrical parameters of ICs, Technical (hardware) means of automatic systems for measuring and monitoring electrical parameters of ICs; Software for automatic systems for measuring and monitoring electrical parameters of ICs; Methods for monitoring digital ICs; Methods for monitoring analog ICs; Methods for monitoring IC DAC and ADC; Examples of automatic IC control equipment. Schemes, graphs, tables, formulas. References - 19 titles.


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Publisher Высшая школа
Publication date 1984
Bookbinding Hardcover

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